Optical surface profiler

Location: SRDG cleanroom

The Wyko NT1100 Optical surface profiler from Veeco is a metrology system using non-contact interferometry to measure surface features. The system has two measurement modes:

• Vertical shift interferometry (VSI): this uses white light and is used for measuring features in the range 140 nm to several mm
• Phase shift interferometry (PSI): utilising a filtered light source and a piezo electric phase shift small features can be measured, ~1 to 140 nm.

The system has an automated stitching stage for large area coverage.Measurements can be made on any reflective surface.

Contact Liam Cunningham