@ARTICLE{Samarelli2014a, title = {{M}ultilayered {G}e/{S}i{G}e {M}aterial in {M}icrofabricated {T}hermoelectric {M}odules}, status = {}, author = {Samarelli, A., Llin, L. F., Cecchi, S., Chrastina, D., Isella, G., Etzelstorfer, T., Stangl, J., Gubler, E. M., Weaver, J. M. R., Dobson, P. and Paul, D. J.}, journal = {Journal of Electronic Materials}, volume = {43}, pages = {3838-3843}, year = {2014}, }